PRODUCTS

(주)펀솔루션테크놀러지

Product (주)펀솔루션테크놀러지

Evaporator

ItemDescriptionRemark
Chamber typeSquare & Vertical
MaterialsStainless steel
Vacuum gaugeFull Range Gauge
Hi-vac. pumpCryo Pump
Low-vac. pumpDry Pump
Substrate movingRotation : 0~30rpm
Up/down -Tray moving
Wall heatingBy micro sheath heater
Control temp : 80 ℃		Heater base

Evaporation Source

Low Temp Cell (20cc & 40cc)

TypeSpec
PointOperation Temperature: ~ 500℃
Volume(cc) : 10, 20, 40,150

Evaporation Source

High Temp Cell (20cc & 500cc)

TypeSpec
PointOperation Temperature: ~ 1500℃
Volume(cc) : 5, 10, 20, 50, 150, 250, 500

Linear source concept

TypeSpec
LinearOperation Temperature : ~ 500℃
Volume(cc) : 8000cc (TBD)

Point array concept

TypeSpec
PointOperation Temperature : ~ 1500℃
Volume(cc) : 500cc revolver type

OLED R&D 및 양산 증착장비 공정기술

  • 200*200 및 6GH 다수 공정 Set-up 및 FAT완료
  • 6GH 신규 공정기술 개발 (Linear Point Source)
  • 200*200 및 6GH 다수 H/W Set-up 및 FAT

태양전지 증착 공정기술

  • 태양전지 페로브스카이트 210x210 증착 공정 개발
  • 증착 시뮬레이션 개발
  • Rate control sensor 장비 개발 및 운용

Agency

  • 선진유수기업 연계

국산화(수입대체)

  • 핵심고부가가치 부품
  • 친환경 소재 및 부품

진공부품, 장비개조

진공챔버, Bellows 배관, Gas line etc.

위탁장비개발 / 기술컨설턴트

H/W 및 공정기술

OLED Organic Intermediates

※ Portfolio Expansion & Customization
* 100+ Compounds Available: 상기 리스트 외에도 수십 종의 다양한 유기 화합물 라인업을 보유하고 있습니다.

ProductsCategoryMain Compounds & Purity
OLED OrganicPyridine Ligands2-methyl-8-(pyridin-2-yl)benzofuro [2,3-b]pyridine / 99%+
IntermediatesCarbazole5,12-dihydroindolo[3,2-a]carbazole / 98%+
(OLED 유기물 중간체)Furan / Thiophene3-bromo-benzo[b]naphtho[2,3-d]furan / 99%+
(OLED 유기물 중간체)Aromatic AminesBis(4-isopropylphenyl)amine / 99%+
(OLED 유기물 중간체)OthersFluorenone, Anthracene, Naphthalene, etc. / 99%+

Precision Optics for ELA Process

ELA Window Using For LTPS Process

ProductsMaterialSpec. / Remark
Sapphire WindowSapphire (99.999%)≥98%@308nm / SS-SW60
Beam SplitterMgF2≥99%@308nm / SS-BS65
Protect WindowSynthes Quartz≥98%@308nm / SS-PW80
Annealing WindowSynthes Quartz≥98%@308nm / Max 1200mm
Resonator WindowMgF22±0.5%@308nm (R) / SS-RW 시리즈

Crucible

PBN, Al2O3, BN, AlN 등

ProductsTypeSpec
CrucibleAl2O3, AlNQuantity : 10cc, 20cc, 40cc
CruciblePBNQuantity : 10cc, 20cc, 40cc, 500cc

SiC Thermo-ball

SiC Thermo-ball

ProductsTypeSpec
SiC Thermo-ballGranuleGranule Size : 1~3mm
Quantity : 500g, 1kg

Vacuum Valve Island Series

Valve TypeValve Type
Coating Process For Angle ValvesDN-35/40
DN-63
DN-25
Small Square-Head ValveJRV-2000
JRV-3000
High Vacuum Plate ValveDN250
Pneumatic Angle ValveGM-KF40/50
Micro Vacuum ValveMV-KF10/16

QCM Gold Sensor

QCM Gold Sensor

ProductsTypeSpec
QCM SensorSensor6MHz Gold

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